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Effect of Vacuum Annealing on the Properties of Transparent Conductive AZO Thin Films Prepared by DC Magnetron Sputtering

✍ Scribed by Fang, G.J. ;Li, D.J. ;Yao, B.-L.

Publisher: John Wiley and Sons
Year: 2002
Tongue: English
Weight: 535 KB
Volume: 193
Category: Article
ISSN: 0031-8965
DOI: 10.1002/1521-396x(200209)193:1<139::aid-pssa139>3.0.co;2-d

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