A statistical study of the combined effects of substrate temperature, bias, annealing and a Cr3Si2 undercoating on the tribological properties r.f. sputtered MoS2 coatings: J K G Panitz et al, Thin Solid Films, 154, 1987, 323–332

• Publisher: Elsevier Science
• Year: 1989
• Tongue: English
• Weight: 157 KB
• Volume: 39
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(89)90320-5