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Formation of the TiN/CoSi2system by rapid thermal annealing of a Co/Ti/Si structure

✍ Scribed by V. I. Rudakov; V. N. Gusev

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Features of CoSi2phase formation by two-

✍ V. I. Rudakov; Yu. I. Denisenko; V. V. Naumov; S. G. Simakin 📂 Article 📅 2011 🏛 SP MAIK Nauka/Interperiodica 🌐 English ⚖ 373 KB

Control of the formation of ultrathin Co

✍ V. I. Rudakov; Yu. I. Denisenko; V. V. Naumov; S. G. Simakin 📂 Article 📅 2011 🏛 Springer 🌐 English ⚖ 536 KB

Analysis of the structure and defects in

✍ Karen J. Reeson; Russell S. Spraggs; Russell M. Gwilliam; Brian J. Sealy 📂 Article 📅 1992 🏛 Elsevier Science 🌐 English ⚖ 383 KB

Formation of stable MoSi2/poly-Si films

✍ Portius, R. ;Dietrich, D. ;Hässner, A. ;Raschke, Th. ;Wieser, E. ;Wolke, W. 📂 Article 📅 1987 🏛 John Wiley and Sons 🌐 English ⚖ 577 KB

Effects of post-annealing by the rapid t

✍ Youn Tae Kim; Chi-Hoon Jun; Dae Yong Kim 📂 Article 📅 1999 🏛 Springer US 🌐 English ⚖ 392 KB

Formation of self-aligned TiSi2p+−n junc

✍ M.H. Juang; H.C. Cheng 📂 Article 📅 1992 🏛 Elsevier Science 🌐 English ⚖ 578 KB