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Control of the formation of ultrathin CoSi2layers during the rapid thermal annealing of Ti/Co/Ti/Si(100) structures

✍ Scribed by V. I. Rudakov; Yu. I. Denisenko; V. V. Naumov; S. G. Simakin


Book ID
110215503
Publisher
Springer
Year
2011
Tongue
English
Weight
536 KB
Volume
40
Category
Article
ISSN
1063-7397

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