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Features of CoSi2phase formation by two-stage rapid thermal annealing of Ti/Co/Ti/Si(100) structures

✍ Scribed by V. I. Rudakov; Yu. I. Denisenko; V. V. Naumov; S. G. Simakin

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Control of the formation of ultrathin Co

✍ V. I. Rudakov; Yu. I. Denisenko; V. V. Naumov; S. G. Simakin 📂 Article 📅 2011 🏛 Springer 🌐 English ⚖ 536 KB

Formation of the TiN/CoSi2system by rapi

✍ V. I. Rudakov; V. N. Gusev 📂 Article 📅 2008 🏛 Springer 🌐 English ⚖ 310 KB

Formation of self-aligned TiSi2p+−n junc

✍ M.H. Juang; H.C. Cheng 📂 Article 📅 1992 🏛 Elsevier Science 🌐 English ⚖ 578 KB