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Formation of Ti2AlN nanolaminate films by multilayer-deposition and subsequent rapid thermal annealing

✍ Scribed by Rolf Grieseler; Thomas Kups; Marcus Wilke; Marcus Hopfeld; Peter Schaaf


Book ID
113796012
Publisher
Elsevier Science
Year
2012
Tongue
English
Weight
669 KB
Volume
82
Category
Article
ISSN
0167-577X

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