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Structural and optical properties of hydrogenated amorphous silicon carbide films by helicon wave plasma-enhanced chemical vapour deposition

✍ Scribed by Yu, Wei; Lu, Wanbing; Han, Li; Fu, Guangsheng

Book ID: 121441149
Publisher: Institute of Physics
Year: 2004
Tongue: English
Weight: 184 KB
Volume: 37
Category: Article
ISSN: 0022-3727
DOI: 10.1088/0022-3727/37/23/012

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