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Optical and structural characterization of hydrogenated amorphous silicon carbide thin films prepared by r.f. plasma chemical vapour deposition

✍ Scribed by Pascual, E.; Andújar, J.L.; Fernández, J.L.; Bertran, E.

Book ID
122375121
Publisher
Elsevier Science
Year
1995
Tongue
English
Weight
545 KB
Volume
4
Category
Article
ISSN
0925-9635

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Preparation of hydrogenated amorphous si
Preparation of hydrogenated amorphous silicon carbide thin films by plasma enhanced chemical vapour deposition
✍ J Huran; J Šafránková; A.P. Kobzev 📂 Article 📅 1998 🏛 Elsevier Science 🌐 English ⚖ 252 KB

Thin silicon carbide (SiCI films were prepared by plasma enhanced chemical vapour deposition PECVDI. The structural properties of Sic films were investigated by IR, RBS, and ERD measurement techniques. The results showed that the films contain the typical features found in hydrogenated amorphous Sic