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Microstructure of hydrogenated silicon carbide thin films prepared by chemical vapour deposition techniques

✍ Scribed by F. Köhler; T. Chen; M. Nuys; A. Heidt; M. Luysberg; F. Finger; R. Carius

Book ID
119301081
Publisher
Elsevier Science
Year
2012
Tongue
English
Weight
677 KB
Volume
358
Category
Article
ISSN
0022-3093

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Preparation of hydrogenated amorphous si
Preparation of hydrogenated amorphous silicon carbide thin films by plasma enhanced chemical vapour deposition
✍ J Huran; J Šafránková; A.P. Kobzev 📂 Article 📅 1998 🏛 Elsevier Science 🌐 English ⚖ 252 KB

Thin silicon carbide (SiCI films were prepared by plasma enhanced chemical vapour deposition PECVDI. The structural properties of Sic films were investigated by IR, RBS, and ERD measurement techniques. The results showed that the films contain the typical features found in hydrogenated amorphous Sic