Structural and electrical characterization of AIN thin films obtained by nitridation of Al/Si substrate

✍ Scribed by Jipo Huang; Lianwei Wang; Qinwo Shen; Chenglu Lin; Mikael Östling

• Book ID: 107457839
• Publisher: Springer US
• Year: 1999
• Tongue: English
• Weight: 364 KB
• Volume: 28
• Category: Article
• ISSN: 0361-5235
• DOI: 10.1007/s11664-999-0018-x