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Preparation and characterization of TiO2thin films by PECVD on Si substrate

✍ Scribed by In-Sun Lee; Jong-Wha Kim; Chang-Joo Youn; Sang-Kyu Park; Yoon-Bong Hahn


Book ID
110642282
Publisher
Springer US
Year
1996
Tongue
English
Weight
622 KB
Volume
13
Category
Article
ISSN
0256-1115

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