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Nanostructural features of nc-Si:H thin films prepared by PECVD

✍ Scribed by J.-H Shim; Seongil Im; N.-H Cho

Book ID: 103816060
Publisher: Elsevier Science
Year: 2004
Tongue: English
Weight: 396 KB
Volume: 234
Category: Article
ISSN: 0169-4332
DOI: 10.1016/j.apsusc.2004.05.073

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