✦ LIBER ✦

P-μc-Si1−xGex:H thin film by VHF-PECVD

✍ Scribed by Ze-ren Shang; Jian-jun Zhang; Li-ping Zhang; Zeng-xin Hu; Jun-ming Xue; Ying Zhao; Xin-hua Geng

Book ID: 107509484
Publisher: Tianjin University of Technology
Year: 2008
Tongue: English
Weight: 95 KB
Volume: 4
Category: Article
ISSN: 1673-1905
DOI: 10.1007/s11801-008-7137-0

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

A combinatorial analysis of deposition p

A combinatorial analysis of deposition parameters and substrates on performance of μc-Si:H thin films by VHF-PECVD

✍ Xiao-dan Zhang; Ying Zhao; Feng Zhu; Chang-chun Wei; Chun-ya Wu; Yan-tao Gao; Ji 📂 Article 📅 2005 🏛 Elsevier Science 🌐 English ⚖ 307 KB

Influence of substrate temperature on th

Influence of substrate temperature on the deposition and structural properties of μc-Si: H thin films fabricated with VHF-PECVD

✍ Hui-dong Yang 📂 Article 📅 2005 🏛 Tianjin University of Technology 🌐 English ⚖ 348 KB

Effects of modulation frequency on the s

Effects of modulation frequency on the structure and electrical characteristics of μc-Si:H films prepared by pulsed VHF-PECVD

✍ Shi-feng Wang; Xiao-dan Zhang; Ying Zhao; Chang-chun Wei; Sheng-zhi Xu; Jian Sun 📂 Article 📅 2009 🏛 Tianjin University of Technology 🌐 English ⚖ 161 KB

a-Si:C:H and a-Si:N:H Thin Films Obtaine

a-Si:C:H and a-Si:N:H Thin Films Obtained by PECVD for Applications in Silicon Solar Cells

✍ T. Stapinski; B. Swatowska 📂 Article 📅 2008 🏛 Springer US 🌐 English ⚖ 656 KB

Structural and mechanical properties of

Structural and mechanical properties of a-C:H and Si doped a-C:H thin films grown by LF-PECVD

✍ C. Chouquet; G. Gerbaud; M. Bardet; S. Barrat; A. Billard; F. Sanchette; C. Ducr 📂 Article 📅 2010 🏛 Elsevier Science 🌐 English ⚖ 678 KB

Improvement of a-Si1−xGex:H single-junct

Improvement of a-Si1−xGex:H single-junction thin-film solar cell performance by bandgap profiling techniques

✍ Hung-Jung Hsu; Cheng-Hang Hsu; Chuang-Chuang Tsai 📂 Article 📅 2012 🏛 Elsevier Science 🌐 English ⚖ 462 KB