A combinatorial analysis of deposition parameters and substrates on performance of μc-Si:H thin films by VHF-PECVD

✍ Scribed by Xiao-dan Zhang; Ying Zhao; Feng Zhu; Chang-chun Wei; Chun-ya Wu; Yan-tao Gao; Jian Sun; Guo-fu Hou; Xin-hua Geng; Shao-zhen Xiong

• Publisher: Elsevier Science
• Year: 2005
• Tongue: English
• Weight: 307 KB
• Volume: 245
• Category: Article
• ISSN: 0169-4332
• DOI: 10.1016/j.apsusc.2004.09.109