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a-Si:C:H and a-Si:N:H Thin Films Obtained by PECVD for Applications in Silicon Solar Cells

✍ Scribed by T. Stapinski; B. Swatowska

Book ID
107455150
Publisher
Springer US
Year
2008
Tongue
English
Weight
656 KB
Volume
37
Category
Article
ISSN
0361-5235

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A carbonaceous thin film was made by CVD of 2,5-dimethyl-p-benzoquinone at temperatures between 500 and 1000Β°C and its structural and electronic properties have been studied. The carbonaceous thin film made at 500Β°C has a energy bandgap of 0.25-0.3 eV and a positive Hall coefficient of 5 x 1O-5 m3 C