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Structural and mechanical properties of a-C:H and Si doped a-C:H thin films grown by LF-PECVD

✍ Scribed by C. Chouquet; G. Gerbaud; M. Bardet; S. Barrat; A. Billard; F. Sanchette; C. Ducros

Publisher
Elsevier Science
Year
2010
Tongue
English
Weight
678 KB
Volume
204
Category
Article
ISSN
0257-8972

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