Compositional, structural and mechanical characteristics of nc-TiC/a-C:H nanocomposite films
β Scribed by Yaohui Wang; Xu Zhang; Xianying Wu; Huixing Zhang; Xiaoji Zhang
- Publisher
- Elsevier Science
- Year
- 2008
- Tongue
- English
- Weight
- 699 KB
- Volume
- 255
- Category
- Article
- ISSN
- 0169-4332
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Superhard nanocomposite nc-TiC/a-C:H films, with an excellent combination of high elastic recovery, low friction coefficient and good H/E ratio, were prepared by filtered cathodic vacuum arc technique using the C 2 H 2 gas as the precursor. The effect of C 2 H 2 flow rate on the microstructure, phas
Titanium containing amorphous carbon (TiC/a-C:H) films were deposited by a hybrid IPVD/PECVD (Ionized Physical Vapor Deposition/Plasma Enhanced Chemical Vapor Deposition) process combining titanium target magnetron sputtering and PECVD in an Ar-CH 4 plasma. Films with various carbon contents have be