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Effects of modulation frequency on the structure and electrical characteristics of μc-Si:H films prepared by pulsed VHF-PECVD

✍ Scribed by Shi-feng Wang; Xiao-dan Zhang; Ying Zhao; Chang-chun Wei; Sheng-zhi Xu; Jian Sun; Xin-hua Geng


Book ID
107509619
Publisher
Tianjin University of Technology
Year
2009
Tongue
English
Weight
161 KB
Volume
5
Category
Article
ISSN
1673-1905

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