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Effect of frequency and pulse width on the properties of ta:C films prepared by FCVA together with substrate pulse biasing

✍ Scribed by D Sheeja; B.K Tay; L.J Yu; S.P Lau; J.Y Sze; C.K Cheong

Book ID: 114085466
Publisher: Elsevier Science
Year: 2002
Tongue: English
Weight: 177 KB
Volume: 420-421
Category: Article
ISSN: 0040-6090
DOI: 10.1016/s0040-6090(02)00659-4

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