Structural and electrical characterization of tantalum nitride thin film resistors deposited on AlN substrates for π-type attenuator applications

✍ Scribed by Nguyen Duy Cuong; Dong-Jin Kim; Byoung-Don Kang; Soon-Gil Yoon

• Publisher: Elsevier Science
• Year: 2006
• Tongue: English
• Weight: 330 KB
• Volume: 135
• Category: Article
• ISSN: 0921-5107
• DOI: 10.1016/j.mseb.2006.08.057