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Electrical characterization of SrTiO3 thin films deposited on Si(0 0 1) substrate by liquid injection MOCVD

✍ Scribed by J. Legrand; S. Lhostis; Y. Chang; L. Militaru; C. Lamard; A. Sibai; L. Auvray; M. Audier; J.-P. Sénateur; C. Dubourdieu; F. Ducroquet

Publisher: Elsevier Science
Year: 2004
Tongue: English
Weight: 386 KB
Volume: 72
Category: Article
ISSN: 0167-9317
DOI: 10.1016/j.mee.2004.01.009

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