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Pulsed laser deposition of thin PrxOy films on Si(1 0 0)

✍ Scribed by D Wolfframm; M Ratzke; M Kappa; M.J Montenegro; M Döbeli; Th Lippert; J Reif


Publisher
Elsevier Science
Year
2004
Tongue
English
Weight
282 KB
Volume
109
Category
Article
ISSN
0921-5107

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ZnO thin films on Si(1 1 1) gr
✍ Jie Zhao; Lizhong Hu; Zhaoyang Wang; Jie Sun; Zhijun Wang 📂 Article 📅 2006 🏛 Elsevier Science 🌐 English ⚖ 400 KB

ZnO thin films with highly c-axis orientation have been fabricated on p-type Si(1 1 1) substrates at 400 8C by pulsed laser deposition (PLD) from a metallic Zn target with oxygen pressures between 0.1 and 0.7 mbar. Experimental results indicate that the films deposited at 0.3 and 0.5 mbar have bette