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Electrical and structural properties of tantalum nitride thin films deposited by sputtering

✍ Scribed by R. Petrović; T. Nenadović; N. Kraljević; T. Dimitrijević


Book ID
107862603
Publisher
Elsevier Science
Year
1979
Tongue
English
Weight
437 KB
Volume
57
Category
Article
ISSN
0040-6090

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