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Strain relaxation and surface morphology of compositionally graded Si/Si[sub 1−x]Ge[sub x] buffers

✍ Scribed by Li, J. H.

Book ID: 127225655
Publisher: AVS (American Vacuum Society)
Year: 1998
Tongue: English
Weight: 556 KB
Volume: 16
Category: Article
ISSN: 0734-211X
DOI: 10.1116/1.589948

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