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Strain in hydrogen and oxygen implanted silicon and SOI structures annealed at high pressure

✍ Scribed by J. Bak-Misiuk; I.V. Antonova; A. Misiuk; J. Domagala; V.P. Popov; V.I. Obodnikov; J. Härtwig; A. Romano-Rodriguez; A. Bachrouri

Book ID: 117620113
Publisher: Elsevier Science
Year: 2001
Tongue: English
Weight: 469 KB
Volume: 328
Category: Article
ISSN: 0925-8388
DOI: 10.1016/s0925-8388(01)01344-5

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