Step bunching mechanism in chemical vapor deposition of 6H– and 4H–SiC{0001}

✍ Scribed by Kimoto, Tsunenobu; Itoh, Akira; Matsunami, Hiroyuki; Okano, Tetsuyuki

• Book ID: 120386379
• Publisher: American Institute of Physics
• Year: 1997
• Tongue: English
• Weight: 855 KB
• Volume: 81
• Category: Article
• ISSN: 0021-8979
• DOI: 10.1063/1.365048