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Chemical vapor deposition and characterization of undoped and nitrogen-doped single crystalline 6H-SiC

✍ Scribed by Karmann, S.; Suttrop, W.; SchoÌner, A.; Schadt, M.; Haberstroh, C.; Engelbrecht, F.; Helbig, R.; Pensl, G.; Stein, R. A.; Leibenzeder, S.

Book ID: 120510851
Publisher: American Institute of Physics
Year: 1992
Tongue: English
Weight: 981 KB
Volume: 72
Category: Article
ISSN: 0021-8979
DOI: 10.1063/1.351985

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