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A new doping method using metalorganics in chemical vapor deposition of 6HâSiC

✍ Scribed by Yoshida, S.; Sakuma, E.; Misawa, S.; Gonda, S.

Book ID: 120882807
Publisher: American Institute of Physics
Year: 1984
Tongue: English
Weight: 450 KB
Volume: 55
Category: Article
ISSN: 0021-8979
DOI: 10.1063/1.332859

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