✦ LIBER ✦
Effect of deposition temperature on boron-doped carbon coatings deposited from a BCl3–C3H6–H2 mixture using low pressure chemical vapor deposition
✍ Scribed by Yongsheng Liu; Litong Zhang; Laifei Cheng; Wenbin Yang; Yongdong Xu
- Publisher
- Elsevier Science
- Year
- 2009
- Tongue
- English
- Weight
- 634 KB
- Volume
- 255
- Category
- Article
- ISSN
- 0169-4332
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