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Pressure and temperature dependence of silicon doping of GaAs using Si2H6 in metalorganic chemical vapour deposition

✍ Scribed by P.R. Hageman; M.H.J.M. de Croon; J.N.H. Reek; L.J. Giling

Publisher: Elsevier Science
Year: 1992
Tongue: English
Weight: 756 KB
Volume: 116
Category: Article
ISSN: 0022-0248
DOI: 10.1016/0022-0248(92)90126-4

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