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Total pressure dependence of doping element incorporation during the chemical vapour deposition of epitaxial silicon

✍ Scribed by H. Kühne

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Temperature dependence of doping element

✍ H. Kühne; Dr. R. Sperling 📂 Article 📅 1980 🏛 John Wiley and Sons 🌐 English ⚖ 468 KB 👁 1 views

Temperature dependence of doping element

✍ H. Kühne; Dr. R. Sperling; Th. Morgenstern 📂 Article 📅 1980 🏛 John Wiley and Sons 🌐 English ⚖ 389 KB 👁 1 views

Temperature dependence of doping element

✍ H. Kühne 📂 Article 📅 1980 🏛 John Wiley and Sons 🌐 English ⚖ 425 KB 👁 1 views

Dependence of doping element incorporati

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