✦ LIBER ✦

On the adsorption- and equilibrium-referred interpretation of the doping element incorporation during the growth of CVD epitaxial silicon

✍ Scribed by Dipl.-Chem. H. Kühne

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Total pressure dependence of doping elem

✍ H. Kühne 📂 Article 📅 1982 🏛 John Wiley and Sons 🌐 English ⚖ 369 KB 👁 1 views

Temperature dependence of doping element

✍ H. Kühne; Dr. R. Sperling 📂 Article 📅 1980 🏛 John Wiley and Sons 🌐 English ⚖ 468 KB 👁 1 views

Temperature dependence of doping element

✍ H. Kühne; Dr. R. Sperling; Th. Morgenstern 📂 Article 📅 1980 🏛 John Wiley and Sons 🌐 English ⚖ 389 KB 👁 1 views

The current understanding of epitaxial C

✍ Dr. H. Kühne 📂 Article 📅 1987 🏛 John Wiley and Sons 🌐 English ⚖ 431 KB 👁 1 views

Dependence of doping element incorporati

✍ Dipl.-Chem. H. Kühne 📂 Article 📅 1979 🏛 John Wiley and Sons 🌐 English ⚖ 465 KB 👁 1 views

Temperature dependence of doping element

✍ H. Kühne 📂 Article 📅 1980 🏛 John Wiley and Sons 🌐 English ⚖ 425 KB 👁 1 views