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Sputtering of DyFeCo layers with an unbalanced magnetron

✍ Scribed by D. Mergel; H. Bentin; D. Raasch

Book ID: 107864414
Publisher: Elsevier Science
Year: 1995
Tongue: English
Weight: 782 KB
Volume: 259
Category: Article
ISSN: 0040-6090
DOI: 10.1016/0040-6090(94)06454-7

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