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Reactive sputtering with an unbalanced magnetron

✍ Scribed by R. P. Howson

Book ID: 121657980
Publisher: AVS (American Vacuum Society)
Year: 1992
Tongue: English
Weight: 739 KB
Volume: 10
Category: Article
ISSN: 0734-2101
DOI: 10.1116/1.577747

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