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An unbalanced magnetron sputtering device for low and medium pressures

✍ Scribed by Muralidhar, G. K.; Musil, J.; Kadlec, S.

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Working standard for sound-pressure unit

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680. Efficient low pressure sputtering i

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An optimized in situ argon sputter clean

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