✦ LIBER ✦
680. Efficient low pressure sputtering in a large inverted magnetron suitable for film synthesis: W D Gill and E Kay,Rev Sci Instrum, 36 (3), March 1965, 277–282
- Publisher
- Elsevier Science
- Year
- 1965
- Tongue
- English
- Weight
- 146 KB
- Volume
- 15
- Category
- Article
- ISSN
- 0042-207X
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