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Sputter damage in Si (0 0 1) surface by combination of C60+ and Ar+ ion beams

โœ Scribed by Bang-Ying Yu; Wei-Chun Lin; Ying-Yu Chen; Yu-Chin Lin; Ken-Tsung Wong; Jing-Jong Shyue

Publisher
Elsevier Science
Year
2008
Tongue
English
Weight
711 KB
Volume
255
Category
Article
ISSN
0169-4332

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