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Effect of residual oxygen in Si(1 1 1)-7 × 7 surface on Si+ and Si2+ sputter yields

✍ Scribed by Y. Sakuma; N. Shinde; M. Kato; S. Yagi; K. Soda

Publisher: Elsevier Science
Year: 2007
Tongue: English
Weight: 209 KB
Volume: 258
Category: Article
ISSN: 0168-583X
DOI: 10.1016/j.nimb.2006.12.106

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Effect of residual oxygen in Si(1&#xa0;1&#xa0;1)-7&#xa0;×&#xa0;7 surface on Si+ and Si2+ sputter yields

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