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Ionization probability of secondary ions sputtered from Si(1 1 1) and Ge(1 1 1) surfaces

✍ Scribed by Yasuhiro Sakuma; Masahiko Kato; Shinya Yagi; Kazuo Soda

Publisher: Elsevier Science
Year: 2011
Tongue: English
Weight: 873 KB
Volume: 269
Category: Article
ISSN: 0168-583X
DOI: 10.1016/j.nimb.2010.11.020

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Ionization probability of secondary ions sputtered from Si(1&#xa0;1&#xa0;1) and Ge(1&#xa0;1&#xa0;1) surfaces

Ionization probability of secondary ions sputtered from Si(1 1 1) and Ge(1 1 1) surfaces