SPIE Proceedings [SPIE SPIE Microtechnologies - Grenoble, France (Wednesday 24 April 2013)] Smart Sensors, Actuators, and MEMS VI - Pressure dependence of the quality factor of piezoelectrically driven AlN/Si-microcantilevers

✍ Scribed by Ababneh, A.; Al-Omari, A. N.; Qiu, H. C.; Manzaneque, T.; Hernando, J.; Sánchez-Rojas, J. L.; Bittner, A.; Schmid, U.; Seidel, H.; Schmid, Ulrich; Sánchez de Rojas Aldavero, José Luis; Leester-Schaedel, Monika

• Book ID: 120439988
• Publisher: SPIE
• Year: 2013
• Weight: 675 KB
• Volume: 8763
• Category: Article
• DOI: 10.1117/12.2017353