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SPIE Proceedings [SPIE SPIE Microtechnologies - Grenoble, France (Wednesday 24 April 2013)] Smart Sensors, Actuators, and MEMS VI - Advanced modeling of AlN-based micromachined energy harvesters driven by β-emitting radioisotopes

✍ Scribed by Alamin Dow, Ali B.; Schmid, Ulrich; Kherani, Nazir P.; Schmid, Ulrich; Sánchez de Rojas Aldavero, José Luis; Leester-Schaedel, Monika

Book ID: 120632666
Publisher: SPIE
Year: 2013
Weight: 814 KB
Volume: 8763
Category: Article
DOI: 10.1117/12.2017716

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