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SPIE Proceedings [SPIE SPIE Microtechnologies - Grenoble, France (Wednesday 24 April 2013)] Smart Sensors, Actuators, and MEMS VI - Optical actuation of silicon cantilevers: modelling and experimental investigation

✍ Scribed by Jiang, Fei; Keating, Adrian; Martyuink, Mariusz; Silva, Dilusha; Faraone, Lorenzo; Dell, John M.; Schmid, Ulrich; Sánchez de Rojas Aldavero, José Luis; Leester-Schaedel, Monika

Book ID: 120365225
Publisher: SPIE
Year: 2013
Weight: 278 KB
Volume: 8763
Category: Article
DOI: 10.1117/12.2018431

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