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SPIE Proceedings [SPIE SPIE Microtechnologies - Grenoble, France (Wednesday 24 April 2013)] Smart Sensors, Actuators, and MEMS VI - Microgalvanic nickel pulse plating process for the production of thermal actuators

✍ Scribed by Hansal, W.; Steiner, H.; Mann, R.; Halmdienst, M.; Schalko, J.; Keplinger, F.; Schmid, Ulrich; Sánchez de Rojas Aldavero, José Luis; Leester-Schaedel, Monika

Book ID: 120434306
Publisher: SPIE
Year: 2013
Weight: 704 KB
Volume: 8763
Category: Article
DOI: 10.1117/12.2018001

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