𝔖 Bobbio Scriptorium

✦ LIBER ✦

SPIE Proceedings [SPIE SPIE Microtechnologies - Grenoble, France (Wednesday 24 April 2013)] Smart Sensors, Actuators, and MEMS VI - Ceramic joints for pressure sensors development

✍ Scribed by Novotný, Radovan; Vlach, Radek; Kadlec, Jaroslav; Kuchta, Radek; Schmid, Ulrich; Sánchez de Rojas Aldavero, José Luis; Leester-Schaedel, Monika

Book ID: 121500359
Publisher: SPIE
Year: 2013
Weight: 1021 KB
Volume: 8763
Category: Article
DOI: 10.1117/12.2014229

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

SPIE Proceedings [SPIE SPIE Microtechnol

SPIE Proceedings [SPIE SPIE Microtechnologies - Grenoble, France (Wednesday 24 April 2013)] Smart Sensors, Actuators, and MEMS VI - Development of energy harvester system for avionics

✍ Hadas, Z.; Vetiska, V.; Ancik, Z.; Ondrusek, C.; Singule, V.; Schmid, Ulrich; Sá 📂 Article 📅 2013 🏛 SPIE ⚖ 669 KB

SPIE Proceedings [SPIE SPIE Microtechnol

SPIE Proceedings [SPIE SPIE Microtechnologies - Grenoble, France (Wednesday 24 April 2013)] Smart Sensors, Actuators, and MEMS VI - Optical actuation of silicon cantilevers: modelling and experimental investigation

✍ Jiang, Fei; Keating, Adrian; Martyuink, Mariusz; Silva, Dilusha; Faraone, Lorenz 📂 Article 📅 2013 🏛 SPIE ⚖ 278 KB

SPIE Proceedings [SPIE SPIE Microtechnol

SPIE Proceedings [SPIE SPIE Microtechnologies - Grenoble, France (Wednesday 24 April 2013)] Smart Sensors, Actuators, and MEMS VI - Modeling methods of MEMS micro-speaker with electrostatic working principle

✍ Tumpold, D.; Kaltenbacher, M.; Glacer, C.; Nawaz, M.; Dehé, A.; Schmid, Ulrich; 📂 Article 📅 2013 🏛 SPIE ⚖ 396 KB

SPIE Proceedings [SPIE SPIE Microtechnol

SPIE Proceedings [SPIE SPIE Microtechnologies - Grenoble, France (Wednesday 24 April 2013)] Smart Sensors, Actuators, and MEMS VI - High-speed ultra-broad tuning MEMS-VCSELs for imaging and spectroscopy

✍ Jayaraman, V.; Potsaid, B.; Jiang, J.; Cole, G. D.; Robertson, M. E.; Burgner, C 📂 Article 📅 2013 🏛 SPIE ⚖ 771 KB

SPIE Proceedings [SPIE SPIE Microtechnol

SPIE Proceedings [SPIE SPIE Microtechnologies - Grenoble, France (Wednesday 24 April 2013)] Smart Sensors, Actuators, and MEMS VI - Microgalvanic nickel pulse plating process for the production of thermal actuators

✍ Hansal, W.; Steiner, H.; Mann, R.; Halmdienst, M.; Schalko, J.; Keplinger, F.; S 📂 Article 📅 2013 🏛 SPIE ⚖ 704 KB

SPIE Proceedings [SPIE SPIE Microtechnol

SPIE Proceedings [SPIE SPIE Microtechnologies - Grenoble, France (Wednesday 24 April 2013)] Smart Sensors, Actuators, and MEMS VI - Chemical microsensors based on hydrogels with adjustable measurement range

✍ Haas, W.; Bartha, J. W.; Fischer, W.-J.; Richter, A.; Schmid, Ulrich; Sánchez de 📂 Article 📅 2013 🏛 SPIE ⚖ 560 KB