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SPIE Proceedings [SPIE SPIE Microtechnologies - Grenoble, France (Wednesday 24 April 2013)] Smart Sensors, Actuators, and MEMS VI - Modeling methods of MEMS micro-speaker with electrostatic working principle

✍ Scribed by Tumpold, D.; Kaltenbacher, M.; Glacer, C.; Nawaz, M.; Dehé, A.; Schmid, Ulrich; Sánchez de Rojas Aldavero, José Luis; Leester-Schaedel, Monika

Book ID: 120399405
Publisher: SPIE
Year: 2013
Weight: 396 KB
Volume: 8763
Category: Article
DOI: 10.1117/12.2016468

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