𝔖 Bobbio Scriptorium

✦ LIBER ✦

SPIE Proceedings [SPIE SPIE Microtechnologies - Grenoble, France (Wednesday 24 April 2013)] Smart Sensors, Actuators, and MEMS VI - CMOS compatible low-frequency aluminium nitride MEMS piezoelectric energy harvesting device

✍ Scribed by Jackson, N.; O'Keeffe, R.; O'Neill, M.; Waldron, F.; Mathewson, A.; Schmid, Ulrich; Sánchez de Rojas Aldavero, José Luis; Leester-Schaedel, Monika

Book ID: 121421112
Publisher: SPIE
Year: 2013
Weight: 347 KB
Volume: 8763
Category: Article
DOI: 10.1117/12.2016469

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

SPIE Proceedings [SPIE SPIE Microtechnol

SPIE Proceedings [SPIE SPIE Microtechnologies - Grenoble, France (Wednesday 24 April 2013)] Smart Sensors, Actuators, and MEMS VI - Development of energy harvester system for avionics

✍ Hadas, Z.; Vetiska, V.; Ancik, Z.; Ondrusek, C.; Singule, V.; Schmid, Ulrich; Sá 📂 Article 📅 2013 🏛 SPIE ⚖ 669 KB

SPIE Proceedings [SPIE SPIE Microtechnol

SPIE Proceedings [SPIE SPIE Microtechnologies - Grenoble, France (Wednesday 24 April 2013)] Smart Sensors, Actuators, and MEMS VI - Ceramic joints for pressure sensors development

✍ Novotný, Radovan; Vlach, Radek; Kadlec, Jaroslav; Kuchta, Radek; Schmid, Ulrich; 📂 Article 📅 2013 🏛 SPIE ⚖ 1021 KB

SPIE Proceedings [SPIE SPIE Microtechnol

SPIE Proceedings [SPIE SPIE Microtechnologies - Grenoble, France (Wednesday 24 April 2013)] Smart Sensors, Actuators, and MEMS VI - Design and material aspects for thermoelectric energy harvesting devices in aircrafts

✍ Elefsiniotis, A.; Kokorakis, N.; Becker, Th.; Schmid, U.; Schmid, Ulrich; Sánche 📂 Article 📅 2013 🏛 SPIE ⚖ 382 KB

SPIE Proceedings [SPIE SPIE Microtechnol

SPIE Proceedings [SPIE SPIE Microtechnologies - Grenoble, France (Wednesday 24 April 2013)] Smart Sensors, Actuators, and MEMS VI - Modeling methods of MEMS micro-speaker with electrostatic working principle

✍ Tumpold, D.; Kaltenbacher, M.; Glacer, C.; Nawaz, M.; Dehé, A.; Schmid, Ulrich; 📂 Article 📅 2013 🏛 SPIE ⚖ 396 KB

SPIE Proceedings [SPIE SPIE Microtechnol

SPIE Proceedings [SPIE SPIE Microtechnologies - Grenoble, France (Wednesday 24 April 2013)] Smart Sensors, Actuators, and MEMS VI - Optical actuation of silicon cantilevers: modelling and experimental investigation

✍ Jiang, Fei; Keating, Adrian; Martyuink, Mariusz; Silva, Dilusha; Faraone, Lorenz 📂 Article 📅 2013 🏛 SPIE ⚖ 278 KB

SPIE Proceedings [SPIE SPIE Microtechnol

SPIE Proceedings [SPIE SPIE Microtechnologies - Grenoble, France (Wednesday 24 April 2013)] Smart Sensors, Actuators, and MEMS VI - Design, fabrication and characterization of a micromachined piezoelectric energy harvester excited by ambient vibrations

✍ Alamin Dow, Ali B.; Bittner, Achim; Schmid, Ulrich; Kherani, Nazir P.; Schmid, U 📂 Article 📅 2013 🏛 SPIE ⚖ 598 KB