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SPIE Proceedings [SPIE SPIE Microtechnologies - Grenoble, France (Wednesday 24 April 2013)] Smart Sensors, Actuators, and MEMS VI - Simulation, design and fabrication of a planar micro thermoelectric generator

✍ Scribed by Pelegrini, S.; Adami, A.; Collini, C.; Conci, P.; Lorenzelli, L.; Pasa, A. A.; Schmid, Ulrich; Sánchez de Rojas Aldavero, José Luis; Leester-Schaedel, Monika

Book ID: 120385107
Publisher: SPIE
Year: 2013
Weight: 1014 KB
Volume: 8763
Category: Article
DOI: 10.1117/12.2017238

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