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SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, USA (Sunday 24 February 2013)] Alternative Lithographic Technologies V - A process for low cost wire grid polarizers

✍ Scribed by Watts, M. P. C.; Tong, William M.; Resnick, Douglas J.; Little, M.; Egan, E.; Hochbaum, A.; Johns, C.; Stephansen, S.

Book ID: 121458105
Publisher: SPIE
Year: 2013
Weight: 952 KB
Volume: 8680
Category: Article
DOI: 10.1117/12.2008924

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