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SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, USA (Sunday 24 February 2013)] Advances in Resist Materials and Processing Technology XXX - Metal-polymer nanocomposite resist: a step towards in-situ nanopatterns metallization

โœ Scribed by Abargues, R.; Martinez-Marco, M. L.; Rodriguez-Canto, P. J.; Marques-Hueso, J.; Martinez-Pastor, J. P.; Somervell, Mark H.


Book ID
120167471
Publisher
SPIE
Year
2013
Weight
1004 KB
Volume
8682
Category
Article

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