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SPIE Proceedings [SPIE Micromachining and Microfabrication - San Jose, CA (Saturday 24 January 2004)] Reliability, Testing, and Characterization of MEMS/MOEMS III - Reliable vacuum packaging using NanoGetters and glass frit bonding

✍ Scribed by Sparks, Douglas; Massoud-Ansari, Sonbol; Najafi, Nader; Tanner, Danelle M.; Ramesham, Rajeshuni

No coin nor oath required. For personal study only.

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